CHEMICAL AND ELECTRICAL MECHANISMS IN TITANIUM, PLATINUM, AND HAFNIUM CONTACTS TO ALPHA (6H) SILICON CARBIDE

CHEMICAL AND ELECTRICAL MECHANISMS IN TITANIUM, PLATINUM, AND HAFNIUM CONTACTS TO ALPHA (6H) SILICON CARBIDE

Author(s):

Porter, L.M.

Publication title:

Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

282

Pub. Year:

1993

Page(from):

471

Page(to):

480

Pages:

10

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991774 [1558991778]

Language:

English

Call no.:

M23500/282

Type:

Conference Proceedings

Details

TDL ID:	ZA00015766
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical perspectives of microelectric materials
Conf. info. (Number):	3rd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1992.11.30-1992.12.03

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