COPPER CVD REACTIONS OF Cu(I)(hfac)(vtms) ADSORBED ON TiN
- Author(s):
Guinn, K.V. Donnelly, V.M. Gross, M.E. Baiocchi, F.A. Petrov, I. Greene, J.E. - Publication title:
- Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 282
- Pub. Year:
- 1993
- Page(from):
- 379
- Page(to):
- 386
- Pages:
- 8
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991774 [1558991778]
- Language:
- English
- Call no.:
- M23500/282
- Type:
- Conference Proceedings
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