REPAIR OF FLAT PANEL DISPLAY SUBSTRATES BY LASER DIRECT WRITING OF METALLIC PLATINUM, COPPER AND ALUMINUM AND INSULATING ALUMINUM OXIDE UTILIZING GAS PHASE REACTANTS

REPAIR OF FLAT PANEL DISPLAY SUBSTRATES BY LASER DIRECT WRITING OF METALLIC PLATINUM, COPPER AND ALUMINUM AND INSULATING ALUMINUM OXIDE UTILIZING GAS PHASE REACTANTS

Author(s):

Publication title:

Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

282

Pub. Year:

1993

Page(from):

197

Page(to):

202

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991774 [1558991778]

Language:

English

Call no.:

M23500/282

Type:

Conference Proceedings

Details

TDL ID:	ZA00015766
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical perspectives of microelectric materials
Conf. info. (Number):	3rd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1992.11.30-1992.12.03

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