DRY SURFACE CLEANING OF PLASMA-ETCHED HEMTs
- Author(s):
Pearton, S.J. Ren, F. Katz, A. Chakrabarti, U.K. Lane, E. Hobson, W.S. Kopf, R.F. Abernathy, C.R. Wu, C.S. Bohling, D.A. Ivankovits, J.C. - Publication title:
- Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 282
- Pub. Year:
- 1993
- Page(from):
- 131
- Page(to):
- 138
- Pages:
- 8
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991774 [1558991778]
- Language:
- English
- Call no.:
- M23500/282
- Type:
- Conference Proceedings
Similar Items:
MRS - Materials Research Society |
7
Conference Proceedings
THE INCORPORATION AND BEHAVIOR OF OXYGEN IN AlGaAs GROWN BY MOMBE USING TRIMETHYLAMINE ALANE
Materials Research Society |
Electrochemical Society |
8
Conference Proceedings
HIGH DENSITY MAGNETICALLY CONFINED DRY ETCHING OF METALLIZATION AND DIELECTRICS IN GaAs DEVICE TECHNOLOGY
MRS - Materials Research Society |
Materials Research Society |
9
Conference Proceedings
*SELF-ALIGNED, METAL-MASKED DRY ETCH PROCESSING OF III-V ELECTRONIC AND PHOTONIC DEVICES
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |
11
Conference Proceedings
TRI-LAYER LIFT-OFF METALLIZATION PROCESS USING LOW TEMPERATURE DEPOSITED SiNx
Materials Research Society |
Materials Research Society |
12
Conference Proceedings
IMPLANT ISOLATION OF DEVICE STRUCTURES CONTAINING BURIED, HIGHLY-DOPED LAYERS
Materials Research Society |