METASTABLE SiC AND SiGeC ALLOYS BY CARBON IMPLANTATION AND SOLID PHASE EPITAXY
- Author(s):
Strane, J.W. Edwards, W.J. Mayer, J.W. Stein, H.S. Lee, S.R. Doyle, B.L. Picraux, S.T. - Publication title:
- Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 280
- Pub. Year:
- 1993
- Page(from):
- 609
- Page(to):
- 612
- Pages:
- 4
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991750 [1558991751]
- Language:
- English
- Call no.:
- M23500/280
- Type:
- Conference Proceedings
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