Blank Cover Image

A STUDY OF EXTENDED DEFECTS IN SILICON CRYSTALS AFTER EXPOSURE TO A HYDROGEN PLASMA

Author(s):
Publication title:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
280
Pub. Year:
1993
Page(from):
561
Page(to):
564
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991750 [1558991751]
Language:
English
Call no.:
M23500/280
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings A STUDY OF SURFACE AND SUBSURFACE PROPERTIES OF Si(100) AFTER HYDROGEN ION-BEAM EXPOSURE

Liu, H. X., Schneider, T. P., Montgomery, J., Chen, Y. L., Buczkowski, A., Shimura, F., Nemanich, R. J., Maher, D. M., …

MRS - Materials Research Society
7 Conference Proceedings ELECTRICAL PROPERTIES OF OXIDE-NITRIDE-OXIDE, ONO, HETEROSTRUCTURES FABRICATED BY LOW TEMPERATURE REMOTE PECVD

Ma, Y., Yasuda, T., Chen, Y.L., Lucovsky, G., Maher, D.M.

Materials Research Society
2 Conference Proceedings REDUCTION OF SURFACE ROUGHENING AND SUBSURFACE DEFECTS IN H-PLASMA CLEANING OF Si (100)

Schneider, T.P., Montgomery, J.S., Ying, H., Barnak, J.P., Chen, Y.L., Maher, D.M., Nemanich, R.J.

Electrochemical Society
8 Conference Proceedings Microstructure and Magnetic Properties of Hot-Pressed and Hot-Deformed Composite Magnets Produced by Spark Plasma Sintering Method

Y.L. Ma, D.M. Chen, Q. Shen, P.J. Cao

Trans Tech Publications
3 Conference Proceedings *TRANSPORT AND MICROSTRUCTURE OF MICROCRYSTALLINE SILICON ALLOYS

Lucovsky, G., Wang, C., Williams, M.J., Chen, Y.L., Maher, D.M.

Materials Research Society
9 Conference Proceedings Study on the Microstructure and Magnetic Domain Struture of the Soft Magentic Alloy 1J50

C.H. Li, D.M. Chen, Y.L. Ma, A.R. Zhou, S. Huang

Trans Tech Publications
4 Conference Proceedings ELECTRON MICROSCOPY STUDIES OF UNDOPED AND PHOSPHORUS DOPED Si:H AND Si,C:H FILMS

Chen, Y.L., Bentley, J., Wang, C., Lucovsky, G., Maher, D.M.

Materials Research Society
10 Conference Proceedings Improvement of III-N Surfaces after Inductively Coupled Plasma Dry Etch Exposure

Keogh, D.M., Dupuis, R.D., Feng, M., Raychaudhuri, S., Asbeck, P.M.

Electrochemical Society
5 Conference Proceedings *EXTENDED DEFECTS IN AMORPHIZED AND RAPID THERMALLY ANNEALED SILICON

Maher, D.M., Knoell, R.V., Ellington, M.B., Hull, R., Jacobson, D.C., Joy, D.C.

Materials Research Society
11 Conference Proceedings Thermal Evolution of Hydrogen Related Defects in Silicon Investigated by u-Raman Spectroscopy

Ma, Y., Huang, Y.L., Job, R., Fahrner, W.R., Beaufort, M.-F., Barbot, J. -F.

Electrochemical Society
6 Conference Proceedings ELECTRICAL PROPERTIES OF BORON-DOPED μc-Si:H PREPARED BY REACTIVE MAGNETRON SPUTTERING FROM c-Si TARGETS

Turner, W.A., Williams, M.J., Chen, Y.L., Maher, D.M., Lucovsky, G.

Materials Research Society
12 Conference Proceedings Modeling of Extended Defects in Silicon

Law, M. E., Jones, K. S., Earles, S. K., Lilak, A. D., Xu, J-W.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12