Blank Cover Image

MONTE CARLO SIMULATIONS OF FILM PROFILE EVOLUTION DURING NONPLANAR CVD PROCESSES

Author(s):
Publication title:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
280
Pub. Year:
1993
Page(from):
169
Page(to):
172
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991750 [1558991751]
Language:
English
Call no.:
M23500/280
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Analysis of TPD Spectra on Semiconductor Surfaces by Monte Carlo Simulations

Venkataramani, Rajesh, Jensen, Klavs F.

MRS - Materials Research Society
7 Conference Proceedings MONTE CARLO SIMULATION OF RADIATIVE HEAT TRANSFER IN RAPID THERMAL PROCESSING (RTP) SYSTEMS

Cole, J. V., Knutson, K. L., Jensen, K. F.

MRS - Materials Research Society
2 Conference Proceedings Models of Rarefied CVD Processes at Reduced Pressures and Reduced Dimensions

Coronell, D.G., Jensen, K.F.

Electrochemical Society
8 Conference Proceedings CHARACTERIZATION OF PORE STRUCTURE CHANGES DURING GASIFICATION

Foster, Mark, Jensen, Klavs. F.

American Institute of Chemical Engineers
3 Conference Proceedings Monte Carlo Simulation of Optical Temperature Sensors in RTP Systems

Cole, J. Vernon, Knutson, Karson L., Fiory, Anthony T., Jensen, Klavs F.

MRS - Materials Research Society
9 Conference Proceedings 3-D Atomistic Kinetic Monte Carlo Simulations of Point Defect Incorporation During CVD Diamond Film Growth

Battaile, C., Srolovitz, D. J., Butler, J. E.

MRS - Materials Research Society
4 Conference Proceedings Strategies for Incorporating Molecular Understanding into Multiscale Simulations of Vapor Phase Deposition Processes

Jensen, Klavs F.

American Institute of Chemical Engineers
10 Conference Proceedings (273c) The Hunt for New Catalysts: Continuous Electrochemistry

E. Victoria Dydek, Montana V. Petersen, Daniel G. Nocera, Klavs F. Jensen

American Institute of Chemical Engineers
5 Conference Proceedings The Effect of Multilayer Patterns on Thermal Stress During Rapid Thermal Processing

Hebb, Jeffrey P., Jensen, Klavs F.

MRS - Materials Research Society
11 Conference Proceedings The Potential Effect of Multilayer Patterns on Temperature Uniformity During Rapid Thermal Processing

Hebb, Jeffrey P., Jensen, Klavs F., Egan, Erik W.

MRS - Materials Research Society
6 Conference Proceedings Low Pressure CVD of Silicon Mitride

Roenigk, Karl. F., Jensen, Klavs. F.

American Institute of Chemical Engineers
12 Conference Proceedings The Potential Effect of Multilayer Patterns on Temperature Uniformity During Rapid Thermal Processing

Hebb, Jeffrey P., Jensen, Klavs F., Egan, Erik W.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12