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FORMATION OF WELL-SEPARATED BURIED AND SURFACE NICKEL-SILICIDE LAYERS IN A SINGLE ION IMPLANTATION STEP

Author(s):
Wu, M.F.
De Wachter, J.
Hendrickx, P.
Pattyn, H.
Van Bavel, A.M.
Langouche, G.
Vanhellemont, J.
Bender, H.
Maenhoudt, M.
Bruynseraede, Y.
5 more
Publication title:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
279
Pub. Year:
1993
Page(from):
899
Page(to):
904
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
Language:
English
Call no.:
M23500/279
Type:
Conference Proceedings

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