Blank Cover Image

AN ASSESSMENT OF ECR ARGON PLASMA ETCHING DAMAGE ON Si AND SiO2 INTERFACES

Author(s):
Publication title:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
279
Pub. Year:
1993
Page(from):
861
Page(to):
868
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
Language:
English
Call no.:
M23500/279
Type:
Conference Proceedings

Similar Items:

Nam, C. W., Ashok, S., Tsai, W., Day, M. E.

MRS - Materials Research Society

Singh, L.S.S., Tiwary, K.P., Khan, M.N., Purohit, R.K., Zaidi, Z.H.

SPIE-The International Society for Optical Engineering

Nam, C. W., Ashok, S.

MRS - Materials Research Society

Vartuli, C. B., Pearton, S. J., Abernathy, C. R., Shul, R. J., Kilcoyne, S. P., Crawford, M. Hagerott, Howard, A. J., …

MRS - Materials Research Society

Matsuo, S., Yamamoto, M., Sadoh, T., Tsurushima, T., Gao, D. W., Furukawa, K., Nakashima, H.

MRS-Materials Research Society

van Hassel, J.G., Maahury, J.H., Kaufmann, L.M.F., van Es, C.M., Nouwens, P.A.M.

Electrochemical Society

Pearton, S. J., Chakrabarti, U. K., Katz, A., Ren, F., Fullowan, T. R., Abernathy, C R., Hobson, W. S.

Materials Research Society

Baars,J.W., Keller,R.C., Richter,H.J., Seelmann-Eggebert,M.

SPIE-The International Society for Optical Engineering

Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Mileham, J. R., Shul, R. J., Kilcoyne, S. P., Hagerott-Crawford, M., …

MRS - Materials Research Society

Kar, S., Ashok, S.

Materials Research Society

6 Conference Proceedings ECR, ICP and RIE plasma etching of GaN

Shul, R.J., McClellan, G.B., Rieger, D.J., Hafich, M.J., Drummond, T.J., Pearton, S.J., Abernathy, C.R., Constantine, …

Electrochemical Society

Sano, K., Tamamaki, H., Nomura, M., Wickramanayaka, S., Nakanishi, Y., Hatanaka, Y.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12