AN ASSESSMENT OF ECR ARGON PLASMA ETCHING DAMAGE ON Si AND SiO2 INTERFACES
- Author(s):
- Publication title:
- Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 279
- Pub. Year:
- 1993
- Page(from):
- 861
- Page(to):
- 868
- Pages:
- 8
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991743 [1558991743]
- Language:
- English
- Call no.:
- M23500/279
- Type:
- Conference Proceedings
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