RAMAN SPECTROSCOPY ANALYSIS OF NITROGEN ION IMPLANTATION IN SILICON AND CORRELATION WITH TRANSMISSION ELECTRON MICROSCOPY

RAMAN SPECTROSCOPY ANALYSIS OF NITROGEN ION IMPLANTATION IN SILICON AND CORRELATION WITH TRANSMISSION ELECTRON MICROSCOPY

Author(s):

Publication title:

Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

279

Pub. Year:

1993

Page(from):

177

Page(to):

182

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991743 [1558991743]

Language:

English

Call no.:

M23500/279

Type:

Conference Proceedings

Details

TDL ID:	ZA00015763
Series ID:	PA00000011
Conf. info. (Name):	Symposium on beam-solid interactions
Conf. info. (Number):	1992
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1992.11.30-1992.12.04

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