ELECTRON-BEAM-INDUCED DAMAGE IN GaAs/AlGaAs HETEROSTRUCTURES

ELECTRON-BEAM-INDUCED DAMAGE IN GaAs/AlGaAs HETEROSTRUCTURES

Author(s):

Publication title:

Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

279

Pub. Year:

1993

Page(from):

99

Page(to):

104

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991743 [1558991743]

Language:

English

Call no.:

M23500/279

Type:

Conference Proceedings

Details

TDL ID:	ZA00015763
Series ID:	PA00000011
Conf. info. (Name):	Symposium on beam-solid interactions
Conf. info. (Number):	1992
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1992.11.30-1992.12.04

Similar Items:

1 Conference Proceedings ELECTRON BEAM INDUCED DEGRADATION OF 2DEG IN AlGaAs/GaAs HETEROSTRUCTURE Wada, T., Kanayama, T., Ichimura, S., Sugiyama, Y., Komuro, M. MRS - Materials Research Society	7 Conference Proceedings Electrically Detected Magnetic Resonance on GaAs/AlGaAs Heterostructures Wimbauer, T., Hofmann, D. M., Meyer, B. K., Brandt, M. S., Brandl, T., Bayerl, M. W., Reinacher, N. M., Stutzmann, M., … MRS - Materials Research Society
2 Conference Proceedings Danrages in AlGaAs/GaAs Heterostructures Induced by keV-Electron-Beam Irradiation Wada,T., Kanayama,T., Tada,T., Wang,X.-L., Sugiyama,Y., Komuro,M. Trans Tech Publications	8 Conference Proceedings PATTERNING OF GaAs/AlGaAs WAFERS BY FOCUSED ELECTRON-BEAM INDUCED CHLORINE ETCHING AND SUBSEQUENT MBE GROWTH Taneya, M., Sugimoto, Y., Hidaka, H., Akita, K. Materials Research Society
3 Conference Proceedings BURIED QUANTUM WELL STRUCTURE FABRICATED BY IN SITU EB LITHOGRAPHY Kawanishi, H., Sugimoto, Y., Ishikawa, T., Tanaka, N., Hidaka, H. Materials Research Society	9 Conference Proceedings ENHANCEMENTS IN TWO DIMENSIONAL ELECTRON GAS DENSITY AND MOBILITY IN δ-DOPED AlGaAs HETEROSTRUCTURES Cunningham, J. E., Timp, G. L., Schubert, E. F., Tsang, W. T., DeVegnar, P. G. N., Chiu, T. H., Agyekum, E. Materials Research Society
4 Conference Proceedings SPATIAL DAMAGE DISTRIBUTION IN ELECTRON-BEAM PROCESSED GaAs-AlGaAs HETEROSTRUCTURES, EXPERIMENT AND THEORY Smith, Doran D., Fink, Tobin, Braddock, W.D. Materials Research Society	10 Conference Proceedings AlGaAs-GaAs heterostructure -doped field-effect transistor (-FET) Chakhnakia, Z.D., Khvedelidze, L.V., Khuchua, N.P., Melkadze, R.G., Peradze, G., Sakharova, T.B., Hatzopoulos, Z. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Irradiation-Induced Damage and Intermixing of GaAs-AlGaAs Quantum Wells Tan, H. H., Williams, J. S., Jagadish, C., Burke, P. T., Gal, M. MRS - Materials Research Society	11 Conference Proceedings A PHOTOLUMINESCENCE INVESTIGATION OF ION BEAM AND ELECTRON CYCLOTRON RESONANCE ETCH-INDUCED DAMAGED ON GaAs/A1GaAs MULTI QUANTUM WELL STRUCTURES Bensaoula, A. H., Bensaoula, A,, Freundlich, A. Materials Research Society
6 Conference Proceedings AlGaAs/GaAs DOUBLE-HETEROSTRUCTURE OPTICAL WAVEGUIDE ON Si SUBSTRATES Yuasa, T., Umeno, M., Sakai, S., Wada, N., Ueta, Y. Materials Research Society	12 Conference Proceedings Electron-Beam-Induced Reactivation Of Si Dopants In Hydrogenated And Deuterated 2D Algaas Heterostructures:Application to the Fabrication of Nanostructures Kurowski, L., Silvestre, S., Loridant-Bernard, D., Constant, E., Barbe, M., Chevallier, J., Constant, M. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12