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THE EFFECT OF TEMPERATURE AND PRESSURE ON RESIDUAL STRESS IN LPCVD POLYSILICON FILMS

Author(s):
Publication title:
Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
276
Pub. Year:
1992
Page(from):
85
Page(to):
90
Pages:
6
Pub. info.:
Philadelphia, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991712 [1558991719]
Language:
English
Call no.:
M23500/276
Type:
Conference Proceedings

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