Blank Cover Image

STRESS AND MICROSTRUCTURE IN PHOSPHORUS DOPED POLYCRYSTALLINE SILICON

Author(s):
Publication title:
Smart materials fabrication and materials for micro-elctro-mechanical systems : symposium held April 28-30, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
276
Pub. Year:
1992
Page(from):
79
Page(to):
84
Pages:
6
Pub. info.:
Philadelphia, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991712 [1558991719]
Language:
English
Call no.:
M23500/276
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings STRESS AND MICROSTRUCTURE IN LPCVD POLYCRYSTALLINE SILICON FILMS: EXPERIMENTAL RESULTS AND CLOSED FORM MODELING OF STRESSES

Krulevitch, P., Johnson, G. C., Howe, R. T.

Materials Research Society
7 Conference Proceedings *CHARACTERIZATION OF THIN FILMS USING MICROMECHANICAL STRUCTURES

Pratt, R.I., Johnson, G.C., Howe, R.T., Nikkel, Jr., D.J.

Materials Research Society
2 Conference Proceedings LPCVD POLYCRYSTALLINE SILICON THIN FILMS: THE EVOLUTION OF STRUCTURE, TEXTURE AND STRESS

Krulevitch, R., Nguyen, Tai D., Johnson, G.C., Howe, R.T., Wenk, H.R., Gronsky, R.

Materials Research Society
8 Conference Proceedings Curvature of a Cantilever Beam Subjected to an Equi-Biaxial Bending Moment

Krulevitch, P., Johnson, G. C.

MRS - Materials Research Society
3 Conference Proceedings STRESS-CORROSION CRACKING AND BLISTERING OF THIN POLYCRYSTALLINE SILICON FILMS IN HYDROFLUORIC ACID

Monk, D. J., Krulevitch, P., Howe, R. T., Johnson, G. C.

MRS - Materials Research Society
9 Conference Proceedings INVESTIGATION OF TEXTURE AND STRESS IN UNDOPED POLYSILICON FILMS

Huang, J., Krulevich, P., Johnson, G. C., Howe, R. T., Wenk, H. R.

Materials Research Society
4 Conference Proceedings Fracture Strength of Polycrystalline Silicon

Jones, P. T., Johnson, G. C., Howe, R. T.

MRS - Materials Research Society
10 Conference Proceedings Polysilicon surface-micromachined spatial light modulator with novel electronic integration

Dimas, C.E., Bifano, T.G., Bierden, P.A., Perrault, J.A., Krulevitch, P., Roehnelt, R.T., Cornelissen, S.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Statistical characterization of fracture of brittle MEMS materials

Jones,P.T., Johnson,G.C., Howe,R.T.

SPIE - The International Society for Optical Engineering
11 Conference Proceedings PHOSPHORUS DIFFUSION IN POLYCRYSTALLINE SILICON: MONTE CARLO SIMULATION OF EXPERIMENTAL DIFFUSION PROFILES

Lavine, J. P., Lee, S. -T., Black, D. L., Losee, D. L., Jarman, C. M.

Materials Research Society
6 Conference Proceedings Materials characterization for MEMS:a comparison of uniaxial and bending tests

Johnson,G.C., Jones,P.T., Howe,R.T.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings The Stress and Microstructure Analysis of Polycrystalline Silicon Films Deposited by LPCVD

Y.T. Cherng, M.C. Boysel, B.D. Gates

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12