Blank Cover Image

NEW APPROACHED FOR DRY ETCHING METAL OXIDES AT LOW TEMPERATURE AND HIGH RATES

Author(s):
Rousseau, Francois
Jain, A.
Perry, L.
Kodas, T. T.
Hampden-Smith, M. J.
Paffett, M.
Muenchausen, R.
2 more
Publication title:
Materials modification by energetic atoms and ions : symposium held April 28-30, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
268
Pub. Year:
1992
Page(from):
59
Page(to):
62
Pages:
4
Pub. info.:
Pittsburgh, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558991637 [1558991638]
Language:
English
Call no.:
M23500/268
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Utilization of β-diketones for etching and cleaning of metal oxide and sulfide thin films

Droes, Steven R., Jain, A., Kodas, T. T., Hampden-Smith, M. J., Muenchausen, R.

MRS - Materials Research Society
7 Conference Proceedings SYNTHESIS OF NEW COPPER(I) β-DIKETONATE COMPOUNDS FOR CVD OF COPPER

Shin, H.K., Chi, K.-M., Hampden-Smith, M.J., Kodas, T.T., Farr, J.D., Paffett, M.F.

Materials Research Society
2 Conference Proceedings DRY ETCHING OF COPPER AT HIGH RATES

Farkas, Janos, Rousseau, Francois, Chi, Kai-Ming, Kodas, Toivo T., Hampden-Smith, Mark J.

Materials Research Society
8 Conference Proceedings Nature of the Green Luminescent Center in Zinc Oxide

Vanheusden, K., Warren, W. L., Seager, C. H., Tallant, D. R., Caruso, J., Hampden-Smith, M. J., Kodas, T. T.

MRS - Materials Research Society
3 Conference Proceedings New route to thermal dry-etching of copper using hydrogen peroside (H2O2) and hexafluoroacetylacetone (HFACH)

A. Jain, T.T. Kodas, M.J. Hampden-Smith

Society of Photo-optical Instrumentation Engineers
9 Conference Proceedings PASSIVATION OF SILICON DIOXIDE SURFACE HYDROXYL GROUPS TO CONTROL SELECTIVITY DURING CHEMICAL VAPOR DEPOSITION OF COPPER FROM COPPER(I) COMPOUNDS

Jain, Ajay, Farkas, J., Kodas, T. T., Hampden-Smith, M. J., Gelatos, A. V., Marsh, R., Mogab, C. J.

MRS - Materials Research Society
4 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF COPPER FROM METAL-ORGANIC COPPER ( I ) PHOSPHINE COMPLEXES

Shin, H. -K., Hampden-Smith, M. J., Kodas, T. T., Duesler, E.. N., Farr, J. D., Paffett, M.

Materials Research Society
10 Conference Proceedings KINETICS OF CHEMICAL VAPOR DEPOSITION OF COOPER FROM (β-diketonate) CuL PRECURSORS

Jain, Ajay, Chi, K M., Kodas, T. T., Hampden-smith, M. J.

Materials Research Society
5 Conference Proceedings FORMATION OF HIGHLY DISPERSED METALS ON FUNCTIONALIZED SILICA SUPPORTS

Rousseau, Francois, Duan, Z., Hampden-Smith, M.J., Datye, A.

Materials Research Society
11 Conference Proceedings Synthesis and characterization of metal silicide/silicon carbide composites by low temperature solid-state reactions

Zeng, D., Hampden-Smith, M. J., Wang, L. -M.

MRS - Materials Research Society
6 Conference Proceedings AEROSOL ROUTES TO PEROVSKITE PHASE MIXED METAL OXIDES

Chandler, C. D., Powell, Q., Hampden-Smith, M. J., Kodas, T. T.

MRS - Materials Research Society
12 Conference Proceedings Oxidation Resistance of Copper Alloy Thin Films Formed by Chemical Vapor Deposition

Atanasova, P., Bhaskaran, V., Kodas, T., Hampden-Smith, M.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12