INITIAL STUDIES ON THE HETEROEXPITAXIAL GROWTH OF THIN FILMS OF (A1/In)N ON AIN-SEEDED (00.1) SAPPHIRE BY SINGLE-TARGET REACTIVE MAGNETRON SPUTTERING

INITIAL STUDIES ON THE HETEROEXPITAXIAL GROWTH OF THIN FILMS OF (A1/In)N ON AIN-SEEDED (00.1) SAPPHIRE BY SINGLE-TARGET REACTIVE MAGNETRON SPUTTERING

Author(s):

Publication title:

Mechanisms of Heteroepitaxial growth : symposium held April 27-30, 1992, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

263

Pub. Year:

1992

Page(from):

95

Page(to):

100

Pages:

6

Pub. info.:

Pittsburgh, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558991583 [1558991581]

Language:

English

Call no.:

M23500/263

Type:

Conference Proceedings

Details

TDL ID:	ZA00015747
Series ID:	PA00000011
Conf. info. (Name):	Symposium on mechanisms of heteroepitaxial growth
Conf. info. (Number):	1992
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1992.04.27-1992.04.30

Similar Items:

1 Conference Proceedings GROWTH DEPENDENCE OF THICKNESS, MORPHOLOGY AND ELECTRICAL TRANSPORT OF InN OVERLAYERS ON AIN-NUCLEATED (00.1) SAPPHIRE Kistenmacher, T.J., Ecelberger, S.A., Bryden, W.A. Materials Research Society	7 Conference Proceedings GROWTH AND PHYSICAL PROPERTIES OF rf-MAGNETRON SPUTTERED InN SEMICONDUCTING FILMS Bryden, W.A., Morgan, J.S., Kistenmacher, T.J., Dayan, D., Fainchtein, R., Poehler, T.O. Materials Research Society
2 Conference Proceedings STRUCTURAL AND ELECTRICAL PROPERTIES OF THERMALLY ANNEALED InN THIN FILMS ON NATIVE AND AlN-NUCLEATED (00.1) SAPPHIRE Kistenmacher, T. J., Ecelberger, S. A., Bryden, W. A., Hawley, M. E. MRS - Materials Research Society	8 Conference Proceedings GROWTH MORPHOLOGY OF InN THIN FILMS BY SCANNING TUNNELING AND ATOMIC FORCE MICROSCOPIES AND X-RAY SCATTERING Bryden, Wayne A., Hawley, Marilyn E., Ecelberger, Scott, A., Kistenmacher, Thomas J. MRS - Materials Research Society
3 Conference Proceedings *SYSTEMATIC STUDIES ON MAGNETRON-SPUTTERED INDIUM NITRIDE Bryden, W.A., Ecelberger, S.A., Morgan, J.S., Poehler, T.O., Kistenmacher, T.J. Materials Research Society	9 Conference Proceedings SPUTTER DEPOSITION OF INDIUM NITRIDE ON THE (111) FACE OF ELEMENTAL AND COMPOUND SEMICONDUCTORS Morgan, J.S., Kistenmacher, T.J., Bryden, W.A., Ecelberger, S.A. Materials Research Society
4 Conference Proceedings SEEDED HETEROEPITAXY AND THE OVERGROWTH OF InN FILMS: NUCLEATION WITH LATTICE MISMATCHED AIN Kistenmacher, Thomas J., Ecelberger, Scott A., Bryden, Wayne A. Materials Research Society	10 Conference Proceedings SUBSTRATE DEPENDENT TEXTURE AND HETEROEPITAXY FOR GROUP IIIA NITRIDE FILMS BY THE X-RAY PRECESSION METHOD Kistenmacher, T.J., Bryden, W.A., Wickenden, D.K., Ecelberger, S.A. Materials Research Society
5 Conference Proceedings MORPHOLOGY AND LOW TEMPERATURE ELECTRICAL TRANSPORT IN HETEROEPITAXIAL INDIUM NITRIDE FILMS Bryden, W. A., Ecelberger, S. A., Kistenmacher, T. J, Materials Research Society	11 Conference Proceedings Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering F. Magnus, B. Agnarsson, A.S. Ingason, K. Leosson, S. Olafsson, J.T. Gudmundsson Materials Research Society
6 Conference Proceedings EVOLUTION OF ELECTRICAL PROPERTIES WITH THERMAL ANNEALING FOR SEEDED HETEROEPITAXIAL InN THIN FILMS Bryden, Wayne A., Ecelberger, Scott A., Kistenmacher, Thomas J. Materials Research Society	12 Conference Proceedings THE EFFECT OF SELF NUCLEATION LAYERS ON THE MOCVD GROWTH OF GALLIUM NITRIDE ON SAPPHIRE Wickenden, D. K., Kistenmacher, T. J., Bryden, W. A., Morgan, J. S., Wickenden, Estes Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12