Blank Cover Image

NONCONTACT CHARACTERIZATION FOR ULTRAVIOLET LIGHT IRRADIATION EFFECT ON Si-SiO2 INTERFACE

Author(s):
Publication title:
Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
262
Pub. Year:
1992
Page(from):
1067
Page(to):
1072
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991576 [1558991573]
Language:
English
Call no.:
M23500/262
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ULTRAVIOLET (UV) IRRADIATION EFFECT ON MINORITY-CARRIER RECOMBINATION LIFETIME IN SILICON WAFERS WITH OXIDE AND NITRIDE FILMS

Zhong, L., Shimura, F.

MRS - Materials Research Society
7 Conference Proceedings Performance estimation of projection display system using a diffraction-based liquid crystal spatial light modulator

Shimura,K.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings INFLUENCE OF BONDING TEMPERATURE ON THE ELECTRICAL PROPERTIES OF SI/SIO2 INTERFACES IN BONDED SILICON-ON-INSULATOR WAFERS

L. Ling, L. Zhong, A. Buczkowski, Z.J. Radminski, T. Abe, F. Shimura

Electrochemical Society
8 Conference Proceedings Structure of the Si-SiO2 interface

Plucinski,K.J.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Characterization of Cu-Al Alloy/SiO2 Interface Microstructure

Wang, P.-I., Murarka, S.P., Yang, G.-R., Barnat, E., Lu, T.-M., Chen, Y.-C., Li, X., Ranjan, K.

Materials Research Society
9 Conference Proceedings Improvement of SiO2/4H-SiC Interface Quality by Post-Oxidation Annealing in N2 at High-Temperatures

A. Chanthaphan, Y.H. Cheng, T. Hosoi, T. Shimura, H. Watanabe

Trans Tech Publications
4 Conference Proceedings Characterization of Cu-Al Alloy/SiO2 Interface Microstructure

Wang, Pei-I., Murarka, S.P., Yang, G-R., Barnat, E., Lu, T-M., Chen, Y-C., Li, Xiang, Rajan, K.

Materials Research Society
10 Conference Proceedings ESR Characterization of SiC Bulk Crystals and SiO2/SiC Interface

Isoya, J., Kosugi, R., Fukuda, K., Yamasaki, S.

Trans Tech Publications
5 Conference Proceedings Characterization of SiO2/SiC Interfaces Annealed in N2O or POCl3

P. Fiorenza, L.K. Swanson, M. Vivona, F. Giannazzo, C. Bongiorno

Trans Tech Publications
11 Conference Proceedings ESR Characterization of SiC Bulk Crystals and SiO2/SiC Interface

Isoya, J., Kosugi, R., Fukuda, K., Yamasaki, S.

Trans Tech Publications
6 Conference Proceedings Characterization of 4H-SiC-SiO2 Interfaces by a Deep Ultraviolet Spectroscopic Ellipsometer

H. Seki, T. Wakabayashi, Y. Hijikata, H. Yaguchi, S. Yoshida

Trans Tech Publications
12 Conference Proceedings Interface Effect on the Transverse Thermal Conductivity of SiO2 Films Deposited on Silicon

Zhao, W., Brotzen, F. R., Hehn. L., Loos, P. J.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12