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FABRICATION OF HOLLOW HIGH ASPECT RATIO METAL MICROSTRUCTURE ARRAYS

Author(s):
Calvert, J. M.
Goerger Jr., J. H.
Rebbert, M. L.
Airerson, M. A.
Park, D.
Hickman, J.J.
Dulcey, C. S.
Peckerar, M. C.
3 more
Publication title:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
260
Pub. Year:
1992
Page(from):
381
Page(to):
386
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991552 [1558991557]
Language:
English
Call no.:
M23500/260
Type:
Conference Proceedings

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