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DETECTION OF TITANIUM SILICIDE FORMATION AND PHASE TRANSFORMATION BY PICOSECOND UNTRASONICS

Author(s):
Lin, H.-N,
Stoner, R. J.
Maris, H. J.
Harper, J. M. E.
Cabral Jr., C.
Halbout, J.-M
Rubloff, G. W.
2 more
Publication title:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
260
Pub. Year:
1992
Page(from):
221
Page(to):
226
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991552 [1558991557]
Language:
English
Call no.:
M23500/260
Type:
Conference Proceedings

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