Blank Cover Image

KINETICS OF CHEMICAL VAPOR DEPOSITION OF COOPER FROM (β-diketonate) CuL PRECURSORS

Author(s):
Publication title:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
260
Pub. Year:
1992
Page(from):
113
Page(to):
118
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991552 [1558991557]
Language:
English
Call no.:
M23500/260
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings CVD OF COPPER FROM (β-DIKETONATE)CuLNCOPPER(1) PRECURSORS

Chi, Kai-Ming, Jain, A., Haampden-Smith, M.. J., Koda, T. T.

Materials Research Society
7 Conference Proceedings Oxidation Resistance of Copper Alloy Thin Films Formed by Chemical Vapor Deposition

Atanasova, P., Bhaskaran, V., Kodas, T., Hampden-Smith, M.

MRS - Materials Research Society
2 Conference Proceedings PASSIVATION OF SILICON DIOXIDE SURFACE HYDROXYL GROUPS TO CONTROL SELECTIVITY DURING CHEMICAL VAPOR DEPOSITION OF COPPER FROM COPPER(I) COMPOUNDS

Jain, Ajay, Farkas, J., Kodas, T. T., Hampden-Smith, M. J., Gelatos, A. V., Marsh, R., Mogab, C. J.

MRS - Materials Research Society
8 Conference Proceedings Oxidation Resistance of Copper Alloy Thin Films Formed by Chemical Vapor Deposition

Atanasova, P., Bhaskaran, V., Kodas, T., Hampden-Smith, M.

MRS - Materials Research Society
3 Conference Proceedings Characteristics of Cu-Pd Films Grown by Simultaneous Chemical Vapor Deposition from Metalorganic Precursors

Bhaskaran, V., Atanasova, P., Hampden-Smith, M. J., Kodas, T. T.

MRS - Materials Research Society
9 Conference Proceedings AEROSOL-ASSISTED CHEMICAL VAPOR DEPOSITION (AACVD) OF BINARY ALLOY FILMS: STUDIES OF FILM COMPOSITION

Xu, Chongying, Hampden-Smith, Mark J., Kodas, Toivo T.

MRS - Materials Research Society
4 Conference Proceedings SYNTHESIS OF NEW COPPER(I) β-DIKETONATE COMPOUNDS FOR CVD OF COPPER

Shin, H.K., Chi, K.-M., Hampden-Smith, M.J., Kodas, T.T., Farr, J.D., Paffett, M.F.

Materials Research Society
10 Conference Proceedings Utilization of β-diketones for etching and cleaning of metal oxide and sulfide thin films

Droes, Steven R., Jain, A., Kodas, T. T., Hampden-Smith, M. J., Muenchausen, R.

MRS - Materials Research Society
5 Conference Proceedings CHEMICAL VAPOR DEPOSITION OF COPPER FROM METAL-ORGANIC COPPER ( I ) PHOSPHINE COMPLEXES

Shin, H. -K., Hampden-Smith, M. J., Kodas, T. T., Duesler, E.. N., Farr, J. D., Paffett, M.

Materials Research Society
11 Conference Proceedings New route to thermal dry-etching of copper using hydrogen peroside (H2O2) and hexafluoroacetylacetone (HFACH)

A. Jain, T.T. Kodas, M.J. Hampden-Smith

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Chemical vapor deposition of palladium on silica and alumina supports

Atanasova, P., Wise, J., Fallbach, M., Kodas, T., Hampden-Smith, M.

Elsevier
12 Conference Proceedings FTIR STUDIES OF SILICA SURFACE PASSIVATION AND SUBSEQUENT ADSORPTION/DESORPTION BEHAVIOR OF COPPER METALORGANIC PRECURSORS

Farkas, Janos, Kodas, T. T., Hampden-Smith, M. J.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12