Blank Cover Image

A MASS SPECTROMETRIC STUDY OF PROCESS STEPS OF A TUNGSTEN LPCVD PROCESS

Author(s):
Publication title:
Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
260
Pub. Year:
1992
Page(from):
85
Page(to):
92
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991552 [1558991557]
Language:
English
Call no.:
M23500/260
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Laser-Induced Thermal Desorption with Fourier Transform Mass Spectrometric Detection

Sherman, M. G., Kingsley, J. R., McIver, R. T., Jr., Hemminger, J. C.

American Chemical Society
7 Conference Proceedings Simulation of Silicon Dioxide Deposition in a Vertical 300 mm LPCVD Furnace

G. J. Schoof, C.R.Kleijn, H. E. A. Van den Akker, T.G.M.Oosterlaken, H. J. C. M. Terhorst, F.Huussen

American Society of Mechanical Engineers
2 Conference Proceedings Mass Spectrometric Methods for Biommolecular Characterization

Nelson W. R., Krone R. J., Tubbs A. K., Dogruel D.

Kluwer Academic Publishers
8 Conference Proceedings Mass spectrometric immunoassay

Krone,J.R., Nelson,R.W., Williams,P.W.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings IN SITU CONTAMINATION CONTROL INVESTIGATION OF SILICON NITRIDE LOW PRESSURE CHEMICAL VAPOR DEPOSITION PROCESS IN VERTICAL THERMAL REACTORS

Moinpour, Mansour, Bohannan, K., Shenasa, M., Sharif, A., Guzzo, G., Brestovansky, D.F., Markle, R.J., Wilkes, R.

Materials Research Society
9 Conference Proceedings Mass Spectrometric Study of the Vaporization Processes and Thermodynamic Properties of SiO2

Shornikov, S.I., Archakov, I.Yu, Stolyarova, V.L., Ivanov, G.G., Shultz, M.M.

Electrochemical Society
4 Conference Proceedings Mass Spectrometric, Thermal, and Separation Studies of Fullerenes

Cox, Donald M., Sherwood, Rexford D., Tindall, Paul, Creegan, Kathleen M., Anderson, William, Martella, David J.

American Chemical Society
10 Conference Proceedings Mass Spectrometric Study of C60O and Isomers of C60O2

Deng, J., Mou, C., Han, C.

Electrochemical Society
5 Conference Proceedings Mass Spectrometric Investigations of the K/C60 Binary System

Borisova, D.Yu., Mavrin, A.A., Sidorov, L.N., Skokan, E.V., Edwards, J.G., Spiridonov, F.M., Ya Borshcbevsky, A., …

Electrochemical Society
11 Conference Proceedings THE EFFECT OF DEPOSITION TEMPERATURE ON THE MICROSTRUCTURE OF LPCVD POLYSILICON FILMS

Hangas, J., Liu, D. R., Oei, D. G., McCarthy, S. L., Peters, C.

Materials Research Society
6 Conference Proceedings Study on the initial steps of the polyethylene cracking over different acid catalysts

Serrano, D. P., Grieken, R. Van, Aguado, J., Garcia, R. A., Rojo, C., Temprano, F.

Elsevier
12 Conference Proceedings Digital control system for mechanical damping of suspended mass

Acernese, F., Barone, F., Rosa, R.D., Milano, L., Qipiani, K., Silvestri, F.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12