ION CHANNELING AND SPECTROSCOPIC ELLIPSOMETRY EXAMINATIONS OF THIN-FILM SiO2/EPI-Si(001) STRUCTURES

ION CHANNELING AND SPECTROSCOPIC ELLIPSOMETRY EXAMINATIONS OF THIN-FILM SiO2/EPI-Si(001) STRUCTURES

Author(s):

Publication title:

Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

259

Pub. Year:

1992

Page(from):

131

Page(to):

136

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991545 [1558991549]

Language:

English

Call no.:

M23500/259

Type:

Conference Proceedings

Details

TDL ID:	ZA00015743
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical surface preparation, passivation, and cleaning for semiconductor growth and processing
Conf. info. (Number):	1992
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	1992.04.27-1992.04.29

Similar Items:

1 Conference Proceedings Spectroscopic Ellipsometry Studies of Nanocrystalline Silicon in Thin-Film Silicon Dioxide Jellison, Gerald E., Jr., Withrow, Stephen P., Jaiswal, Supriya, Rouleau, Christopher M., Simpson, John T., White, Clark … Materials Research Society	7 Conference Proceedings RBS/CHANNELING AND TEN ANALYSIS OF THIN SANDWICHED EPI-LAYERS OF GERMANIUM ON SILICON Swanson, M.L., Parikh, N.P., Frey, E.C., Sandhu, G.S., Chu, W.K., Baribeau, J.-M., Song, Kechang, McCaffrey, J., … Materials Research Society
2 Conference Proceedings Growth of Thin SiO2 by "Spike" Rapid Thermal Oxidation Fiory, A. T. MRS - Materials Research Society	8 Conference Proceedings Tetragonal strain in MBE GexSi1-x films grown on (100) Si observed by ion channeling and x-ray diffraction Fiory, A. T., Feldman, L. C., Bean, J. C., Robison, I. K. North-Holland
3 Conference Proceedings Structure and Dynamics of Si Interstitials at Si(001) and Si(001)/SiO2 Kirichenko, T.A., Yu, D., Banerjee, S.K., Hwang, G.S. Electrochemical Society	9 Conference Proceedings Characterization of Pulsed-Leser Deposited Amorphous Diamond Films by Spectroscopic Ellipsometry Jellison, G. E., Jr., Geohegan, D. B., Lowndes, D. H., Puretzky, A. A., Merkulov, V. I. MRS - Materials Research Society
4 Conference Proceedings SPECTROSCOPIC ELLIPSOMETRY AND INTERFERENCE REFLECTOMETRY MEASUREMENTS OF CVD SILICON GROWN ON OXIDIZED SILICON Jellison Jr., G.E., Keefer, M., Thornquist, L. Materials Research Society	10 Conference Proceedings Growth of TiO₂ Thin Films on Si(001) and SiO₂ by Reactive High Power Impulse Magnetron Sputtering F. Magnus, B. Agnarsson, A.S. Ingason, K. Leosson, S. Olafsson, J.T. Gudmundsson Materials Research Society
5 Conference Proceedings Thickness Determination of Ultra-Thin SiO2 Films on Si by Spectroscopic Ellipsometry Nguyen, N.V., Richter, C.A. Electrochemical Society	11 Conference Proceedings Characterization of Lithium Phosphorous Oxynitride Thin Films Yu, X., Bates, J.B., Jellison, G.E., Jr. Electrochemical Society
6 Conference Proceedings Spectroscopic Ellipsometry Studies of Tb-Doped SiO₂ Thin Films Chu Wan Huang, Zhe Chuan Feng, Yia Chung Chang, Tingkai Li Materiaeditors, Tingkai Li ... [et al.] ls Research Society	12 Conference Proceedings Examination of Biodegradable Polymer Thin Films M. Kollár, G. Zsoldos, T. Szabó, K. Szóda Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12