Blank Cover Image

HF/ETHANOL PREOXIDATION SILICON CLEANING: ANALYSIS OF THE SILICON SURFACE AND OF THE ULTRA-THIN OXIDE LAYER

Author(s):
Garrido, B.
Gessinn, F.
Prom, J.L.
Morante, J.R.
Samitier, J.
Sarrabayrouse, G.
1 more
Publication title:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
259
Pub. Year:
1992
Page(from):
119
Page(to):
124
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991545 [1558991549]
Language:
English
Call no.:
M23500/259
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ANALYSIS OF THE HF-ETHANOL CLEANING PROCESS ON SILICON WAFERS WITH 100 VICINAL SURFACES

Portillo, J., Gual, J., Sarrabayrouse, G., Morante, J. R.

MRS - Materials Research Society
7 Conference Proceedings The Influence of HF, 0H, and Dissolved 02 on Silicon Surface Chemical Cleaning

Higashi, G.S., Chabal, Y.J., Raghavachari, K., Becker, R.S., Green, M.P., Hanson, K., Boone, T., Eisenberg, J.H., Shive, …

Electrochemical Society
2 Conference Proceedings M.O.S. transistors with > 1 ｦﾌm thick gate oxide for ionizing radiation dosimetry

Gessinn, F., Sarrabayrouse, G.

MRS - Materials Research Society
8 Conference Proceedings Low Voltage and High Speed Silicon Nanocrystal Memories

Carreras, Josep, Garrido, B., Arbiol, J., Morante, J. R.

Materials Research Society
3 Conference Proceedings Low Loss Silica Waveguides Containing Si Nanocrystals

Garcia, C., Garrido, B., Pellegrino, P., Morante, J.R., Melchiorri, M., Daldosso, N., Pavesi, L., Scheid, E., …

Materials Research Society
9 Conference Proceedings Modification of the Silicon Surface by Electroless Deposition of Platinum From HF Solutions

Gorostiza, P., Servat, J., Diaz, R., Sanz, F., Morante, J. R.

MRS - Materials Research Society
4 Conference Proceedings PERCOLATION BEHAVIOUR IN THE ELECTRICAL CHARACTERISTICS OF HYDROGENATED AMORPHOUS SILICON NITRIDE FILMS

Lopez-Villegas, J.M., Garrido, B., Benrakkad, M.S., Samitier, J., Bertran, E., Canillas, A., Morante, J.R.

Materials Research Society
10 Conference Proceedings iN SiTU SURFACE ANALYSIS IN HF VAPOR-PHASE CLEANING OF Si

Oostra, D.J., Hakkens, F.J.G.

Electrochemical Society
5 Conference Proceedings Pump-probe experiments on low loss silica waveguides containing Si nanocrystals

Navarro-Urrios, D., Daldosso, N., Melchiorri, M., Sbrana, F., Pavesi, L., Garcia, C., Garrido, B., Pellegrino, P., …

Materials Research Society
11 Conference Proceedings MICROSTRUCTURE OF BURIED THIN ETCH STOP FILMS FORMED BY NITROGEN IMPLANTATION INTO SILICON

Romano-Rodriguez, A., El-Hassani, A., Perez-Rodriguez, A., Samitier, J., Morante, J. R., Esteve, J., Acero, M. C.

MRS - Materials Research Society
6 Conference Proceedings Influence of the Surface Layer Defects on the Conduction Mechanism in Semi-Insulating Gallium Arsenide

Gual,J., Samitier,J., Perez,A., Morante,J.R., Boher,P., Renaud,M.

Trans Tech Publications
12 Conference Proceedings Growth Control and Characterization of Wide Bandgap silicon-Carbon Films

Kerdiles, S., Rizk, R., Perez-Rodriguez, A., Garrido, B., Gonzalez-Varona, O., Calvo-Barrio, L., Morante, J. R.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12