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*SURFACE CONDITIONING ISSUES RELATED TO PATTERNING AND ETCHING

Author(s):
Fonash, S.J.
Ditizio, R.A.
Gu, T.
Mikulan, P.I.
Awadelkarim, O.O.
Collins, R.W.
Rembetski, J.F.
Reinhardt, K.A.
Chan, Y.D.
4 more
Publication title:
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
259
Pub. Year:
1992
Page(from):
55
Page(to):
68
Pages:
14
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991545 [1558991549]
Language:
English
Call no.:
M23500/259
Type:
Conference Proceedings

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