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COMPARATIVE STUDY OF THE OPTICAL AND VIBRATIONAL PROPERTIES OF a-SiNX:H FILMS PREPARED FROM SiH4-N2 AND SiH4-NH3 GAS MIXTURES BY RF PLASMA

Author(s):
Campmany, J.
Bertran, E.
Andujar, J.L.
Canillas, A.
Lopez-Villegas, J.M.
Morante, J.R.
1 more
Publication title:
Amorphous silicon technology, 1992
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
258
Pub. Year:
1992
Page(from):
643
Page(to):
648
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991538 [1558991530]
Language:
English
Call no.:
M23500/258
Type:
Conference Proceedings

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