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SMALL-ANGLE X-RAY SCATTERING FROM a-Si:H AND a-SiC:H ALLOYS PREPARED BY REACTIVE DC MAGNETRON SPUTTERING

Author(s):
Chen, Y.
Jones, S.J.
Williamson, D.L.
Yang, S.
Maley, N.
Abelson, J.R.
1 more
Publication title:
Amorphous silicon technology, 1992
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
258
Pub. Year:
1992
Page(from):
311
Page(to):
318
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991538 [1558991530]
Language:
English
Call no.:
M23500/258
Type:
Conference Proceedings

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