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A PARTICULAR PHOTO-CVD APPARATUS FOR HYDROGENATED AMORPHOUS SILICON DEPOSITION

Author(s):
Manfredotti, C.
Fizzotti, F.
Osenga, C.
Boero, M.
Rigato, V.
Quaranta, A.
1 more
Publication title:
Amorphous silicon technology, 1992
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
258
Pub. Year:
1992
Page(from):
165
Page(to):
172
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991538 [1558991530]
Language:
English
Call no.:
M23500/258
Type:
Conference Proceedings

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