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* VHF PLASMA DEPOSITION: A COMPARATIVE OVERVIEW

Author(s):
Shah, A.
Dutta, J.
Wyrsch, N.
Prasad, K.
Curtins, H.
Finger, F.
Howling, A.
Hollenstein, Ch.
3 more
Publication title:
Amorphous silicon technology, 1992
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
258
Pub. Year:
1992
Page(from):
15
Page(to):
26
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991538 [1558991530]
Language:
English
Call no.:
M23500/258
Type:
Conference Proceedings

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