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CHARACTERIZATION OF MICROPOROUS SILICON FABRICATED BY IMMERSION SCANNING

Author(s):
Bassous, E.
Freeman, M.
Halbout, J.-M.
Iyer, S.S.
Kesan, V.P.
Munguia, P.
Pesarcik, S.F.
Williams, B.L.
3 more
Publication title:
Light emission from silicon : symposium held December 3-5, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
256
Pub. Year:
1992
Page(from):
23
Page(to):
26
Pages:
4
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991507 [1558991506]
Language:
English
Call no.:
M23500/256
Type:
Conference Proceedings

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