REDUCED AMORPHIZATION OF ION-MILLED SILICON CROSS-SECTION TRANSMISSION ELECTRON MICROSCOPE SAMPLES BY DYNAMIC ANNEALING DURING MILLING

REDUCED AMORPHIZATION OF ION-MILLED SILICON CROSS-SECTION TRANSMISSION ELECTRON MICROSCOPE SAMPLES BY DYNAMIC ANNEALING DURING MILLING

Author(s):

Publication title:

Specimen preparation for transmission electron microscopy of materials III : symposium held December 5-6, 1991, Boston, Mass., U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

254

Pub. Year:

1992

Page(from):

249

Page(to):

256

Pages:

8

Pub. info.:

Pittsburgh: Materials Research Society

ISSN:

02729172

ISBN:

9781558991484 [1558991484]

Language:

English

Call no.:

M23500/254

Type:

Conference Proceedings

Details

TDL ID:	ZA00015738
Series ID:	PA00000011
Conf. info. (Name):	Symposium on specimen preparation for transmission electron microscopy of materials
Conf. info. (Number):	3rd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1991.12.05-1991.12.06

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