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THE ROLE OF THE LEAD ZIRCONATE TITANATE (PZT)-Pt INTERFACE IN THE ANOMALOUS PHASE TRANSFORMATION KINETICS IN SPUTTERED PZT THIN FILM CAPACITORS AT SUB-2000 A THICKNESS

Author(s):
Chikarmane, V.
Kim, J.
Sudhama, C.
Lee, J.
Tasch, A.
Novak, S.
1 more
Publication title:
Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
243
Pub. Year:
1992
Page(from):
367
Page(to):
372
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991378 [1558991379]
Language:
English
Call no.:
M23500/243
Type:
Conference Proceedings

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