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APPLICATIONS OF PZT AND RELATED THIN FILMS IN PIEZOELECTRIC MICROSENSORS

Author(s):
Polla, D.L.
Ye, C.
Schiller, P.
Tamagawa, ,T.
Robbins, W.P.
Glumac, D.
Hsueh, C-C.
2 more
Publication title:
Ferroelectric thin films II : symposium held December 2-4, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
243
Pub. Year:
1992
Page(from):
55
Page(to):
60
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991378 [1558991379]
Language:
English
Call no.:
M23500/243
Type:
Conference Proceedings

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