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RAMAN CHARACTERIZATION OF AlGaAs SUPERLATTICE CHANNEL WAVEGUIDE STRUCTURE FORMED BY CIB AND FIB IMPLANTATION

Author(s):
Choo, A. G.
Gupta, V.
Jackson, H. E.
Boyd, J. T.
Steckl, A. J.
Chen, P.
Weiss, B. L.
Burnham, R. D.
3 more
Publication title:
Advanced III-V compound semiconductor growth, processing and devices : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
240
Pub. Year:
1992
Page(from):
691
Page(to):
696
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991347 [1558991344]
Language:
English
Call no.:
M23500/240
Type:
Conference Proceedings

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