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INVESTIGATION OF Ge, As, AND Au DIFFUSION IN NON-ALLOYED EPITAXIAL Au-Ge OHMIC CONTACTS TO n-GaAs USING SECONDARY ION MASS SPECTROSCOPY BACKSIDE SPUTTER DEPTH-PROFILING

Author(s):
Lee, H. S.
Lareau, R. T.
Schauer, S. N.
Moerkirk, R. P.
Jones, K. A.
Elagoz, S.
Vavra, W.
Clarke, R.
3 more
Publication title:
Advanced III-V compound semiconductor growth, processing and devices : symposium held Decmber[i.e. December] 2-5, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
240
Pub. Year:
1992
Page(from):
473
Page(to):
478
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991347 [1558991344]
Language:
English
Call no.:
M23500/240
Type:
Conference Proceedings

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