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*NANOSTRUCTURE FABRICATION: DRY ETCHING DAMAGE

Author(s):
Doughty, G. F.
Cheung, R.
Foad, M. A.
Rahman, M.
Cameron, N. I.
Johnson, N. P.
Wang, P. D.
Wilkinson, C. D. W.
3 more
Publication title:
Photons and low energy particles in surface processing : symposium held Decmber[i.e. December] 3-6, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
236
Pub. Year:
1992
Page(from):
223
Page(to):
234
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991309 [1558991301]
Language:
English
Call no.:
M23500/236
Type:
Conference Proceedings

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