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GROWTH AND HIGH RESOLUTION TEM CHARACTERIZATION OF GexSi1-x/Si HETERO-STRUCTURES BY REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION

Author(s):
Qian, R.
Chung, I.
Kinosky, D.
Hsu, T.
Irby, J.
Mahajan, A.
Thomas, S.
Banerjee, S.
Tasch, A.
Rabenberg, L.
Grove, C.
Magee, C.
7 more
Publication title:
Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
235
Pub. Year:
1992
Page(from):
811
Page(to):
818
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991293 [1558991298]
Language:
English
Call no.:
M23500/235
Type:
Conference Proceedings

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