EFFECT OF INTERMEDIATE THERMAL PROCESSING ON MICROSTRUCTURAL CHANGES OF OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL

EFFECT OF INTERMEDIATE THERMAL PROCESSING ON MICROSTRUCTURAL CHANGES OF OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL

Author(s):

Publication title:

Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

235

Pub. Year:

1992

Page(from):

133

Page(to):

138

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991293 [1558991298]

Language:

English

Call no.:

M23500/235

Type:

Conference Proceedings

Details

TDL ID:	ZA00015719
Series ID:	PA00000011
Conf. info. (Name):	Symposium on phase formation and modification by beam-solid interactions
Conf. info. (Number):	1991
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1991.12.02-1991.12.06

Similar Items:

1 Conference Proceedings ROLE OF OXYGEN PRECIPITATION PROCESSES IN DEFECT FORMATION AND EVOLUTION IN OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL Park, J.C., Lee, J.D., Venables, D., Krause, S., Roitman, P. Materials Research Society	7 Conference Proceedings OXYGEN BUBBLE FORMATION AND TRANSFORMATION DURING HIGH-DOSE OXYGEN IMPLANTATION AND ANNEALING OF SILICON Krause, S.J., Seraphin, S., Chen, B.L., Cordts, B., Roitman, P. Materials Research Society
2 Conference Proceedings DEFECT PAIR FORMATION BY IMPLANTATION-INDUCED STRESSES IN HIGH-DOSE OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL Lee, J. D., Park, J. C., Venables, D., Krause, S. J., Roitman, P. MRS - Materials Research Society	8 Conference Proceedings Effect of nitrogen ambients during high temperature SIMOX annealing Roitman, P., Mayo, S., Simons, D., Krause, S.J., Venables, D., Park, J.C., Lee, J.D., Lenahan, P., Conley, J. Electrochemical Society
3 Conference Proceedings HIGH RESOLUTION ELECTRON MICROSCOPY OF DEFECTS IN HIGH-DOSE OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL Visitserngtrakul, S., Jung, C. O., Cordts, B. F., Roitman, P., Krause, S. J. Materials Research Society	9 Conference Proceedings EFFECT OF IMPLANTATION CONDITIONS ON THE MIROSTRUCTURE OF HIGH-CURRENT, OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL Visitserngtrakul, S., Cordts, B.F., Krause, S. Materials Research Society
4 Conference Proceedings Effect of implantation conditions on defect microstructure in annealed SIMOX Lee, J.D., Park, J.C., Krause, S.J., Venables, D., Roitman, P. Electrochemical Society	10 Conference Proceedings TWINNING STRUCTURE OF (113) DEFECTS IN HIGH-DOSE OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL Visitserngtrakul, S., Barry, J., Krause, S. Materials Research Society
5 Conference Proceedings *PRECIPITATE AND DEFECT FORMATION IN OXYGEN IMPLANTED SILICON-ON-INSULATOR MATERIAL Krause, S. J., Jung, C. O., Ravi, T. S., Wilson, S. R., Burke, D. E. Materials Research Society	11 Conference Proceedings MICROSTRUCTURAL CHARACTERIZATION OF HIGH DOSE OXYGEN IMPLANTED SILICON Batstone, J.L., White, Alice E., Short, K..T., Gibson, J.M., Jacobson, D.C. Materials Research Society
6 Conference Proceedings CHARACTERIZATION AND EVOLUTION OF MICROSTRUCTURES FORMED BY HIGH DOSE OXYGEN IMPLANTATION OF SILICON El-Ghor, M.K., Pennycook, S.J., Sjoreen, T.P., Narayan, J. Materials Research Society	12 Conference Proceedings OXYGEN ION IMPLANTATION INTO GERMANIUM Sjoreen, T. P., Ravindra, N. M., El-Ghor, M. K., Fathy, D. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12