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THE EFFECT OF GRAIN BOUNDARIES AND SUBSTRATE INTERACTIONS WITH HYDROGEN ON THE CVD GROWTH OF DEVICE-QUALITY COPPER

Author(s):
Kaloyeros,A. E.
Dettelbatcher, C.
Eisenbraun, E. T.
Lanford, W. A.
Li, H. J.
Olowolafe, J. F.
Murarka, S.
Pintchovski, F.
Shy, Y. -T.
Toscano, P. J.
5 more
Publication title:
Structure/property relationships for metal/metal interfaces : symposium held April 29-May 1, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
229
Pub. Year:
1990
Page(from):
123
Page(to):
128
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991231 [1558991239]
Language:
English
Call no.:
M23500/229
Type:
Conference Proceedings

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