PREPARATION OF BORON NITRIDE FILMS BY RF REACTIVE SPUTTERING

PREPARATION OF BORON NITRIDE FILMS BY RF REACTIVE SPUTTERING

Author(s):

Publication title:

Materials for optical information processing : symposium held May 1-3, 1991, Anaheim, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

228

Pub. Year:

1992

Page(from):

273

Page(to):

278

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991224 [1558991220]

Language:

English

Call no.:

M23500/228

Type:

Conference Proceedings

Details

TDL ID:	ZA00015712
Series ID:	PA00000011
Conf. info. (Name):	Symposium on Materials for optical information processing
Conf. info. (Number):	1991
Conf. info. (Venue):	Anaheim, CA, USA
Conf. info. (Date):	1991.05.01-1991.05.03

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