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SELECTIVE GROWTH OF POLY-DIAMOND THIN FILMS USING SELECTIVE DAMAGING BY ULTRASONIC AGITATION ON A VARIETY OF SUBSTRATES

Author(s):
Publication title:
Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
226
Pub. Year:
1991
Page(from):
241
Page(to):
248
Pages:
8
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991200 [1558991204]
Language:
English
Call no.:
M23500/226
Type:
Conference Proceedings

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