Blank Cover Image

THE GETTERING AND ELECTRICAL ACTIVITY OF Ni, Au, AND Cu IN EPITAXIAL Si/Si(2%Ge)/Si DURING RTA

Author(s):
Publication title:
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
224
Pub. Year:
1991
Page(from):
55
Page(to):
60
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991187 [1558991182]
Language:
English
Call no.:
M23500/224
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings HYDROGEN INDUCED DEFECTS AT SILICON SURFACES AND BURIED EPITAXIAL MISFIT DISLOCATION INTERFACES

Zhou, Tian-Qun, Radzimski, Zbigniew, Xiao, Zhigang, Sopori, Bhushan, Rozgonyi, George A.

Materials Research Society
7 Conference Proceedings DEEP LEVEL ENERGY ANALYSIS OF SURFACE AND BULK DEFECTS USING A NONCONTACT LASER/MICROWAVE PHOTOCONDUCTANCE TECHNIQUE

Buczkowski, A., Rozgonyi, G. A., Shimura, F.

Materials Research Society
2 Conference Proceedings Gettering of Fe, Cu and Ni in MeV Ion Implanted Epitaxial Silicon

Koveshnikov, S., Kononchuk, O., Beaman, K., Rozgonyi, G.A., Gonzalez, F.

Electrochemical Society
8 Conference Proceedings Degradation of Gate Oxide Integrity due to Ni and Cu Contamination and Impurity Gettering in Epitaxial Si Wafers

Koveshnikov, S., Beauchaine, D., Radzimski, Z., Higgs, V.

Electrochemical Society
3 Conference Proceedings TEMPERATURE DEPENDENT RECOMBINATION LIFETIME IN SILICON: INFLUENCE OF TRAP LEVEL

Buczkowski, Andrzej, Radzimski, Zbigniew J., Kirino, Yoshi, Shimura, Fumio, Rozgonyi, George A.

Materials Research Society
9 Conference Proceedings (583e) Comparison of Cu-, Fe- and Ni- Based Oxygen Carriers for Chemical-Looping Combustion

Zhiquan Zhou, Oscar Nordness, George M. Bollas

American Institute of Chemical Engineers
4 Conference Proceedings INFLUENCE OF BONDING TEMPERATURE ON THE ELECTRICAL PROPERTIES OF SI/SIO2 INTERFACES IN BONDED SILICON-ON-INSULATOR WAFERS

L. Ling, L. Zhong, A. Buczkowski, Z.J. Radminski, T. Abe, F. Shimura

Electrochemical Society
10 Conference Proceedings (15.3) 1:50 - 2:10 PM - The Impact of Strained-Si/SiGe Heterostructure Dislocations on the Electrical Activity of Defects

Czerwinski, A., Kordas, L., Bray, K.R., Zhao, W., Wise, R., Rozgonyi, G. A. (NC St. Univ.)

Electrochemical Society
5 Conference Proceedings Diffusion and Gettering of 3d Transition Metals (Fe, Cu, Ni) in Silicon-On-Insulator Structures

Korablev, K, Kononchuk, O, Yarykin, N, Glasko, I, Uspenskaya, L, Rozgonyi, G

Electrochemical Society
11 Conference Proceedings Dopant Diffusion and Point Defects ni Silicon During Silicidation

Honeycutt W. J., Rozgonyi A. G.

Kluwer Academic Publishers
6 Conference Proceedings EXTRINSIC GETTERING WITH EPITAXIAL MISFIT DISLOCATIONS

Salih, A. S. M., Maszara, W., Kim, H. J., Rozgonyi, G. A.

Materials Research Society
12 Conference Proceedings INTERFACIAL MORPHOLOGY OF SILICIDES FORMED VIA RTA OF SPUTTERED Bi- AND MULTI-LAYER Co/Ti(O,C) ON Si

Hong, Feng, Patnaik, Bijoy K., Li, Bingzong, Liu, Ping, Sun, Zen, Rozgonyi, George A.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12