ARGON PLASMA INDUCED SURFACE MODIFICATIONS FOR RESISTLESS PATTERNING OF ALUMINUM FILMS
- Author(s):
- Publication title:
- Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 223
- Pub. Year:
- 1991
- Page(from):
- 389
- Page(to):
- 394
- Pages:
- 6
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991170 [1558991174]
- Language:
- English
- Call no.:
- M23500/223
- Type:
- Conference Proceedings
Similar Items:
Materials Research Society |
7
Conference Proceedings
CW Argon-Ion Laser Initiated Aluminum Induced Crystallization of Amorphous Silicon Thin Films
Materials Research Society |
2
Conference Proceedings
EFFECTS OF NITROGEN ION IMPLANTATION IN 304 STAINLESS STEEL AT HIGH TEMPERATURES
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
SPIE - The International Society for Optical Engineering |
4
Conference Proceedings
Plasma Modification of DLC Films and the Resulting Surface Biocompatibility
Trans Tech Publications |
Materials Research Society |
5
Conference Proceedings
Growth of Patterned SiC by Ion Modification and Annealing of C60 Films on Silicon
MRS - Materials Research Society |
11
Conference Proceedings
Resistless Patterning of Magnetic Storage Media Using Ion Projection Structuring
Materials Research Society |
American Chemical Society |
12
Conference Proceedings
Femtosecond pulse laser ablation and surface modification of aluminum alloy 2024
SPIE - The International Society for Optical Engineering |