THE INFLUENCE OF HBr DISCHARGE AMBIENCE ON POLY-Si/ SiO2 ETCHING SELECTIVITY
- Author(s):
- Publication title:
- Low energy ion beam and plasma modification of materials : symposium held April 30-May 2, 1991, Anaheim, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 223
- Pub. Year:
- 1991
- Page(from):
- 255
- Page(to):
- 262
- Pages:
- 8
- Pub. info.:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991170 [1558991174]
- Language:
- English
- Call no.:
- M23500/223
- Type:
- Conference Proceedings
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