*BEAM ASSISTED ATOMIC LAYER CONTROLLED EPITAXY AND ETCHING OF GaAs
- Author(s):
- Publication title:
- Atomic layer growth and processing : symposium held April 29 - May 1, 1991, Anaheim, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 222
- Pub. Year:
- 1991
- Page(from):
- 121
- Page(to):
- 132
- Pages:
- 12
- Pub. info.:
- Pittsburgh: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991163 [1558991166]
- Language:
- English
- Call no.:
- M23500/222
- Type:
- Conference Proceedings
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