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IN SITU MEASUREMENTS OF HYDROGEN FLUX, SURFACE COVERAGE, INCORPORATION AND DESORPTION DURING MAGNETRON SPUTTER-DEPOSITION OF a-Si:H

Author(s):
Abelson, J.R.
Maley, N.
Doyle, J.R.
Feng, G.F.
Fitzner, M.
Katiyar, M.
Mandrell, L.
Myers, A.M.
Nuruddin, A.
Ruzic, D.N.
Yang, S.
6 more
Publication title:
Amorphous silicon technology 1991 : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
219
Pub. Year:
1991
Page(from):
619
Page(to):
630
Pages:
12
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991132 [1558991131]
Language:
English
Call no.:
M23500/219
Type:
Conference Proceedings

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