Blank Cover Image

THE EFFECT OF HYDROGEN ON THE KINETICS OF SOLID PHASE EPITAXY IN AMORPHOUS SILICON

Author(s):
Publication title:
Kinetics of phase transformations : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
205
Pub. Year:
1992
Page(from):
45
Page(to):
50
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990975 [1558990976]
Language:
English
Call no.:
M23500/205
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings DIFFUSION OF HYDROGEN IN AMORPHOUS SILICON IN THE LOW CONCENTRATION REGIME

Roth, J.A., Olson, G.L., Jacobson, D.C., Poate, J.M.

Materials Research Society
7 Conference Proceedings Competition between solid phase epitaxy and random crystallization during cw laser annealing of amorphous Si films

Roth, J.A., Kokorowski, S.A., Olson, G.L., Hess, L.D.

North Holland
2 Conference Proceedings DIFFUSION, SOLUBILITY AND SEGREGATION OF IMPLANTED Cu, Ag AND Au IN AMORPHOUS Si

Jacobson, D.C., Elliman, R.G., Gibson, J.M., Olson, G.L., Poate, J.M., Williams, J.S.

Materials Research Society
8 Conference Proceedings *LATERAL SOLID PHASE EPITAXY OF SILICON OVER OXIDE

Roth, J. A., Olson, G. L., Hess, L. D.

North-Holland
3 Conference Proceedings IMPURITY DIFFUSION, CRYSTALLIZATION AND PHASE SEPARATION IN AMORPHOUS SILICON

Elliman, R.G., Poate, J.M., Williams, J.S., Gibson, J.M., Jacobson, D.C., Sood, D.K.

Materials Research Society
9 Conference Proceedings CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si

Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M.

Materials Research Society
4 Conference Proceedings Laser-induced solid phase epitaxy of silicon deposited films

Roth, J.A., Olson, G.L., Kokorowski, S.A., Hess, L.D.

North Holland
10 Conference Proceedings CHANGING SEGREGATION COEFFICIENTS DURING ION BEAM INDUCED EPITAXY OF AMORPHOUS Si

Custer, J.S., Thompson, Michael O., Jacobson, D.C., Poate, J.M.

Materials Research Society
5 Conference Proceedings EFFECTS OF IMPURITIES ON THE KINETICS OF NUCLEATION AND GROWTH IN AMORPHOUS SILICON

Roth, J.A., Olson, G.L.

Materials Research Society
11 Conference Proceedings *ION-BEAM-INDUCED EPITAXY AND SOLUTE SEGREGATION AT THE Si CRYSTAL-AMORPHOUS INTERFACE

Poate, J.M., Jacobson, D.C., Priolo, F., Thompson, Michael O.

Materials Research Society
6 Conference Proceedings Diffusion of gold in amorphous silicon

Frank,W., Gustin,W., Coffa,S., Poate,J.M., Jacobson,D.C.

Trans Tech Publications
12 Conference Proceedings THE EFFECT OF SELF-IMPLANTATION ON THE INTERDIFFUSION OF AMORPHOUS Si/Ge MULTILAYERS

Park, B., Spaepen, F., Poate, J.M., Jacobson, D.C.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12