HIGH PERFORMANCE 0.5 AND 0.25 μm GATE GaAs MESFET GROWN BY MOCVD USING TERTIARYBUTYLARSINE

HIGH PERFORMANCE 0.5 AND 0.25 μm GATE GaAs MESFET GROWN BY MOCVD USING TERTIARYBUTYLARSINE

Author(s):

Sundaram, V.S.

Publication title:

Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

204

Pub. Year:

1991

Page(from):

123

Page(to):

128

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990968 [1558990968]

Language:

English

Call no.:

M23500/204

Type:

Conference Proceedings

Details

TDL ID:	ZA00015688
Series ID:	PA00000011
Conf. info. (Name):	Symposium on chemical perspectives of microelectronic materials
Conf. info. (Number):	2nd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1990.11.26-1990.11.28

Similar Items:

1 Conference Proceedings Effect of Gate Profile on the Characteristics of 0.5μm GaAs MESFETs Naik, A.A., Rawal, D.S., Prabhakar, S., Sai Saravanan, G., Sehgal, B.K., Gulati, R., Vyas, H.P., Kumar, Rajesh, … SPIE-The International Society for Optical Engineering	7 Conference Proceedings Dual Salicide and Self-aligned Metal Gate Formation for Sub-0.25μm CMOS Technologies Using CMP Weling, M., Lin, X.-W. Electrochemical Society
2 Conference Proceedings Pulsed I- V-Studies on 0.5μm GaAs MESFETs Kumar, Ashok, Sharma, Renu, Trivedi, Raman Kumar, Ray, U.C. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Electrical and Chemical Properties of Ultrathin RT-MOCVD Grown Ti-Doped Ta2O5 Lee, S.J., Luan, H.F., Mao, A., Jeon, T.S., Lee, C.H., Vrtis, R., Roberts, D., Kwong, D.-L. Electrochemical Society
3 Conference Proceedings Deep Level Studies in GaAs-Ga0.5Al0.5As Superlattices Grown by MOCVD Ababou,S., Bremond,G., Roura,P., Mayet,L., Guillot,G., Coleman,J.J. Trans Tech Publications	9 Conference Proceedings PHOTOREFLECTANCE OF A GaAs/In0.5Ga0.5P(ORDERED) SINGLE QUANTUM WELL GROWN BY ATOMIC LAYER EPITAXY Yin, X., Pollak, Fred H., McDermott, B.T., Reid, K.G., Bedair, S.M. Materials Research Society
4 Conference Proceedings Integration Challenges of Inorganic Low-K (K < 2.5) Materials With Cu for Sub-0.25)μm Multilevel Interconnects Blumenthal, R., Braekelmann, G., Cave, N. G., Conner, J., Crabtree, P., Defilippi, J., Denning, D., Farkas, J., … Materials Research Society	10 Conference Proceedings Development of (La0.75Sr0.25)(Cr0.5Mn0.5)O3 Cathodes of Solid Oxide Fuel Cells by Gelcasting Technique S. Jiang, L. Zhang, C. Cheng Electrochemical Society
5 Conference Proceedings "2.5-V, 1-Gb/s/ch parallel optical receiver in 0.25-μm CMOS technology" Jung,S.-J., Kim,H.-S., Kim,D.-G., Choi,Y.-W. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Optimizing 0.25-µm lithography using confocal microscopy R.E. Colgan, H.M. Marchman Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Aligned In0.5Ga0.5As quantum dots on laser-patterned GaAs substrate Park,S.K., Hyon,C.K., Min,B.D., Kim,H.J., Hwang,S.M., Kim,E.K., Lee,H.K., Lee,C., Kim,Y. SPIE - The International Society for Optical Engineering	12 Conference Proceedings PREPARATION OF PbTiO3-Pb(Mg0.5W0.5)O3 THIN FILMS USING PULSED LASER DEPOSITION Lee, B.W., Lee, H.M., Cook, L.P., Schenck, P.K., Paul, A., Wong-Ng, W., Chiang, C.K., Brody, P.S., Rod, B.J., Bennett, … Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12