STRUCTURAL AND ELECTRICAL PROPERTIES OF TIN AND CARBON CO-IMPLANTED SILICON

STRUCTURAL AND ELECTRICAL PROPERTIES OF TIN AND CARBON CO-IMPLANTED SILICON

Author(s):

Publication title:

Surface chemistry and beam-solid interactions : symposium held November 26-29, 1990, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

201

Pub. Year:

1991

Page(from):

235

Page(to):

240

Pages:

6

Pub. info.:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558990074 [1558990070]

Language:

English

Call no.:

M23500/201

Type:

Conference Proceedings

Details

TDL ID:	ZA00015685
Series ID:	PA00000011
Conf. info. (Name):	Symposium on surface chemistry and beam-solid interactions
Conf. info. (Number):	1990
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1990.11.26-1990.11.29

Similar Items:

1 Conference Proceedings Structural and electrical properties of beryllium implanted silicon carbide Henkel, T., Tanaka, Y., Kobayashi, N., Tanoue, H., Gong, M., Chen, X. D., Fung, S., Beling, C. D. MRS-Materials Research Society	7 Conference Proceedings Structural, optical and electrical characteristics of silicon carbon nitride Chen, L. C., Wu, C. T., Wen, C-Y., Wu, J-J., Liu, W. T., Liu, C. W. MRS-Materials Research Society
2 Conference Proceedings The Configurational Change of a Metastable S-Cu Defect in Silicon Chen,W.M., Janzen,E., Monemar,B., Henry,A., Frens,A.M., Bennebroek,M.T., Schmidt,J. Trans Tech Publications	8 Conference Proceedings Electrical Profiles of Ultra-Low Energy Antimony Implants in Silicon Alzanki, T., Gwilliam, R., Emerson, N., Sealy, B.J., Collart, E. Materials Research Society
3 Conference Proceedings CHARACTERIZATION OF THE PLASMA CHEMISTRY AND FILM COMPOSITION OF PECVD SILICON NITRIDE DEPOSITED FROM SILANE-NITROGEN AND SILANE-AMMONIA MIXTURES WITH ARGON … Quinn, W.E., Bagley, B.G., Wilkens, B.J., Gallois, B.M. Materials Research Society	9 Conference Proceedings Compact HMD optics based on multiplexed aberration-compensated holographic optical elements Aye,T.M., Yu,K., Tengara,I., Peppler,P.W., Pierce,B.J. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Magnetic Resonance Techniques for Excited State Spectroscopy of Defects in Silicon Chen,W.M., Monemar,B., Frens,A.M., Bennebroek,M.T., Schmidt,J.(invited) Trans Tech Publications	10 Conference Proceedings Photoablation with the free-electron laser in the far IR in biological soft tissue (cornea) R. Walker, M. Ostertag, T. Bende, P.W. van Amersfoort, B.J. Jean Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings THE EFFECT OF Co-IMPLANTATION ON THE ELECTRICAL ACTIVITY OF IMPLANTED CARBON IN GaAs Moll, A. J., Walukiewicz, W., Yu, K. M., Hansen, W. L., Haller, E. E. Materials Research Society	11 Conference Proceedings Electrical and Structural Properties of MeV Si+ Ion Implantation in Silicon Agarwal, Aditya, Koveshnikov, S., Christensen, K., Rozgonyi, G. A. MRS - Materials Research Society
6 Conference Proceedings Electrical and optical properties of GaAs doped with Li Gislason,H.P., Yang,B., Hauksson,I.S., Gudmundsson,J.T., Linnarsson,M., Janzen,E. Trans Tech Publications	12 Conference Proceedings Observation of Rapid Direct Charge Transfer between Deep Defects in Silicon Frens,A.M., Bennebroek,M.T., Zakrzewski,A., Schmidt,J., Chen,W.M., Janzen,E., Lindstrom,J.L., Monemar,B. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12