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SCALING PROPERTIES IN THE ELECTRICAL AND RELIABILITY CHARACTERISTICS OF LEAD-ZIRCONATE-TITANATE (PZT) FERROELECTRIC THIN FILM CAPACITORS

Author(s):
Sudhama, C.
Carrano, J.C.
Parker, L.H.
Chikarmane, V.
Lee, J.C.
Tasch, A.F.
Miller, W.
Abt, N.
Shepherd, W.H.
4 more
Publication title:
Ferroelectric thin films : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
200
Pub. Year:
1990
Page(from):
331
Page(to):
336
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990890 [1558990895]
Language:
English
Call no.:
M23500/200
Type:
Conference Proceedings

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