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LEAD ZIRCONATE TITANATE FILMS PRODUCED BY ‘FACING TARGETS’ RF-SPUTTERING

Author(s):
Publication title:
Ferroelectric thin films : symposium held April 16-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
200
Pub. Year:
1990
Page(from):
77
Page(to):
82
Pages:
6
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990890 [1558990895]
Language:
English
Call no.:
M23500/200
Type:
Conference Proceedings

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