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Cross-Sectional TEM Specimen Preparation of Semiconductor Devices by Focused Ion Beam Etching

Author(s):
Park, K. -H  
Publication title:
Specimen preparation for transmission electron microscopy of materials--II : symposium held April 19-20, 1990, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
199
Pub. Year:
1990
Page(from):
271
Page(to):
280
Pages:
10
Pub. info.:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558990883 [1558990887]
Language:
English
Call no.:
M23500/199
Type:
Conference Proceedings

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